Aerospace and Mechanical Engineering 455:
Introduction to Microelectromechanical Systems (3.0-4.0 units)
Introduction to micro-electro-mechanical systems (MEMS); scaling effects; materials and structures in MEMS; MEMS sensing and actuation principles; microfabrication.
Section | Session | Units | Type | Time | Days | Registered | Instructor | Location | Syllabus | Info |
---|---|---|---|---|---|---|---|---|---|---|
28861R | 001 | 3.0 | Lecture | 10:00-11:50am | Mon, Wed | 36 of 40 | Hangbo Zhao | DMC101 |