Materials Science 507:

Micro- and Nano-Fabrication Technology (4.0 units)

Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; pattern transfer methods.
  • Crosslist: This course is offered by the EE department but may qualify for major credit in MASC. To register, enroll in EE 507.
30773R048Lecture2:00-3:50pmMon, Wed21 of 55Wei WuTHH114PDF (297288 KB)session dates
Information accurate as of March 10, 2022 2:00 pm.
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