Electrical and Computer Engineering 507:
Micro- and Nano-Fabrication Technology (4.0 units)
Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; pattern transfer methods.
| Section | Session | Type | Time | Days | Registered | Instructor | Location | Syllabus | Info |
|---|---|---|---|---|---|---|---|---|---|
| 30773R | 048 | Lecture | 2:00-3:50pm | Mon, Wed | 21 of 55 | Wei Wu | THH114 | PDF (297288 KB) |  |