Aerospace and Mechanical Engineering 455:
Introduction to MEMS (3.0 units)
Introduction to micro-electro-opto-mechanical systems; scaling effects on material properties, fluid flows, dynamical behavior; fabrication methods; design considerations for MEMS sensors and actuators. Recommended preparation: AME 301, AME 309 and AME 310
| Section | Session | Type | Time | Days | Registered | Instructor | Location | Syllabus | Info |
|---|---|---|---|---|---|---|---|---|---|
| 28861R | 001 | Lecture | 9:30-10:50am | Mon, Wed | 24 of 30 | Hangbo Zhao | VPDLL101 | PDF (212485 KB) |  |