Materials Science 507:
Micro- and Nano-Fabrication Technology (3.0 units)
Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; patterntransfer methods.
- Crosslist: This course is offered by the EE department but may qualify for major credit in MASC. To register, enroll in EE 507.
|30580D||048||Lecture||2:00-3:20pm||Mon, Wed||47 of 50||Wei Wu||MHPB7B||PDF (365444 KB)|