Electrical Engineering 507:

Micro- and Nano-Fabrication Technology (3.0 units)

Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; patterntransfer methods.
    SectionSessionTypeTimeDaysRegisteredInstructorLocationSyllabusInfo
    30580D048Lecture2:00-3:20pmMon, Wed47 of 50Wei WuMHPB7BPDF (365444 KB)feesession dates
    Information accurate as of October 3, 2018 10:51 am.