Electrical Engineering 507:
Micro- and Nano-Fabrication Technology (3.0 units)
Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; patterntransfer methods.
| Section | Session | Type | Time | Days | Registered | Instructor | Location | Syllabus | Info |
|---|---|---|---|---|---|---|---|---|---|
| 30580D | 048 | Lecture | 2:00-3:20pm | Mon, Wed | 47 of 50 | Wei Wu | MHPB7B | PDF (365444 KB) |   |