Electrical Engineering 508:

Nano-Fabrication Lithography (3.0 units)

Physical basis of lithography methods for nano-scale devices. Photon-, electron-, and ion-based systems, advanced processes; resolution enhancement techniques; directed self assembly.
    30772R048Lecture2:00-3:20pmMon, Wed43 of 57Wei WuSGM601PDF (142059 KB)feesession dates
    Information accurate as of March 4, 2018 5:28 pm.
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