Electrical Engineering 508:
Nano-Fabrication Lithography (3.0 units)
Physical basis of lithography methods for nano-scale devices. Photon-, electron-, and ion-based systems, advanced processes; resolution enhancement techniques; directed self assembly.
| Section | Session | Type | Time | Days | Registered | Instructor | Location | Syllabus | Info |
|---|---|---|---|---|---|---|---|---|---|
| 30772R | 048 | Lecture | 2:00-3:20pm | Mon, Wed | 43 of 57 | Wei Wu | SGM601 | PDF (142059 KB) |   |