Electrical Engineering 507:
Micro- and Nano-Fabrication Technology (3.0 units)
Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; pattern-transfer methods. Recommended preparation: graduate standing in engineering, physics, or chemistry.
| Section | Session | Type | Time | Days | Registered | Instructor | Location | Syllabus | Info |
|---|---|---|---|---|---|---|---|---|---|
| 30580R | 048 | Lecture | 2:00-3:20pm | Mon, Wed | 19 of 70 | Wei Wu | ZHS252 | PDF (360044 KB) |   |