Electrical Engineering 508:

Nano-Fabrication Lithography (3.0 units)

Physical basis of lithography methods for nano-scale devices. Photon-, electron-, and ion-based systems, advanced processes; resolution enhancement techniques; directed self assembly.
    SectionSessionTypeTimeDaysRegisteredInstructorLocationSyllabusInfo
    30772R048Lecture2:00-3:20pmMon, Wed35 of 57Wei WuVPD116PDF (394234 KB)feesession dates
    Information accurate as of March 7, 2016 8:09 am.